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Influence of oxygen on copper gettering in hydrocarbon molecular ion implanted region using atom probe tomography |
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Titel: |
Influence of oxygen on copper gettering in hydrocarbon molecular ion implanted region using atom probe tomography |
Auteur: |
Shigematsu, Satoshi Okuyama, Ryosuke Hirose, Ryo Kadono, Takeshi Onaka-Masada, Ayumi Suzuki, Akihiro Kobayashi, Koji Okuda, Hidehiko Koga, Yoshihiro Kurita, Kazunari |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 478 () nr. C pagina's 99-103 |
Jaar: |
2020 |
Inhoud: |
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Uitgever: |
The Authors |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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