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Journal description
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Details for article 26 of 46 found articles
| Title: |
Influence of oxygen on copper gettering in hydrocarbon molecular ion implanted region using atom probe tomography |
| Author: |
Shigematsu, Satoshi Okuyama, Ryosuke Hirose, Ryo Kadono, Takeshi Onaka-Masada, Ayumi Suzuki, Akihiro Kobayashi, Koji Okuda, Hidehiko Koga, Yoshihiro Kurita, Kazunari |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 478 () nr. C pages 99-103 |
| Year: |
2020 |
| Contents: | |
| Publisher: |
The Authors |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 26 of 46 found articles
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