|
Effect of hafnium contaminant present in zirconium targets on sputter deposited ZrN thin films |
|
|
|
Titel: |
Effect of hafnium contaminant present in zirconium targets on sputter deposited ZrN thin films |
Auteur: |
Fernandez, D.A.R. Brito, B.S.S. Santos, I.A.D. Soares, V.F.D. Terto, A.R. de Oliveira, G.B. Hubler, R. Batista, W.W. Tentardini, E.K. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 462 () nr. C pagina's 90-94 |
Jaar: |
2020 |
Inhoud: |
|
Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|