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Effect of hafnium contaminant present in zirconium targets on sputter deposited ZrN thin films |
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Title: |
Effect of hafnium contaminant present in zirconium targets on sputter deposited ZrN thin films |
Author: |
Fernandez, D.A.R. Brito, B.S.S. Santos, I.A.D. Soares, V.F.D. Terto, A.R. de Oliveira, G.B. Hubler, R. Batista, W.W. Tentardini, E.K. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 462 () nr. C pages 90-94 |
Year: |
2020 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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