|
RBS analysis of beam-processed microarea by focused MeV ion beam |
|
|
|
Title: |
RBS analysis of beam-processed microarea by focused MeV ion beam |
Author: |
Kinomura, A. Takai, M. Matsuo, T. Ujiie, S. Namba, S. Satou, M. Kiuchi, M. Fujii, K. Shiokawa, T. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 39 (1989) nr. 1-4 pages 3 p. |
Year: |
1989 |
Contents: |
|
Publisher: |
Published by Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|