Simultaneous quantification of light elements in thin films deposited on Si substrates using proton EBS (Elastic Backscattering Spectroscopy)
Titel:
Simultaneous quantification of light elements in thin films deposited on Si substrates using proton EBS (Elastic Backscattering Spectroscopy)
Auteur:
Ferrer, F.J. Alcaire, M. Caballero-Hernández, J. Garcia-Garcia, F.J. Gil-Rostra, J. Terriza, A. Godinho, V. García-López, J. Barranco, A. Fernández-Camacho, A.
Verschenen in:
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms