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FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application |
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Titel: |
FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application |
Auteur: |
Zheng, B. Iketa, N. Takeda, Y. Sato, K. Sato, R. Amekura, H. Oyoshi, K. Kono, K. Edwards, M.E. Song, M. Ila, D. Kishimoto, N. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 272 (2012) nr. C pagina's 5 p. |
Jaar: |
2012 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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