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Journal description
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Details for article 37 of 113 found articles
| Title: |
FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application |
| Author: |
Zheng, B. Iketa, N. Takeda, Y. Sato, K. Sato, R. Amekura, H. Oyoshi, K. Kono, K. Edwards, M.E. Song, M. Ila, D. Kishimoto, N. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 272 (2012) nr. C pages 5 p. |
| Year: |
2012 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 37 of 113 found articles
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