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Exploring the sheet resistance variation with various beam current densities in low-energy ion implantation |
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Titel: |
Exploring the sheet resistance variation with various beam current densities in low-energy ion implantation |
Auteur: |
Lai, Yi-Sheng Chen, J.S. Sun, H.L. Chen, Z.B. Tien, C.T. Yeh, S.Y. Chen, C.W. Lee, F.S. Ho, Y.S. Hsu, P.Y. Wu, H.H. Wang, J.H. Yang, C.M. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 244 (2006) nr. 2 pagina's 5 p. |
Jaar: |
2006 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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