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Details for article 15 of 33 found articles
| Title: |
Exploring the sheet resistance variation with various beam current densities in low-energy ion implantation |
| Author: |
Lai, Yi-Sheng Chen, J.S. Sun, H.L. Chen, Z.B. Tien, C.T. Yeh, S.Y. Chen, C.W. Lee, F.S. Ho, Y.S. Hsu, P.Y. Wu, H.H. Wang, J.H. Yang, C.M. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 244 (2006) nr. 2 pages 5 p. |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 33 found articles
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