|
Materials surface modification by plasma bombardment under simultaneous erosion and redeposition conditions |
|
|
|
Titel: |
Materials surface modification by plasma bombardment under simultaneous erosion and redeposition conditions |
Auteur: |
Hirooka, Y. Goebel, D.M. Conn, R.W. Campbell, G.A. Leung, W.K. Wilson, K.L. Bauer, W. Causey, R.A. Morse, D.H. Bohdansky, J. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 23 (1987) nr. 4 pagina's 13 p. |
Jaar: |
1987 |
Inhoud: |
|
Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|