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Materials surface modification by plasma bombardment under simultaneous erosion and redeposition conditions |
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Title: |
Materials surface modification by plasma bombardment under simultaneous erosion and redeposition conditions |
Author: |
Hirooka, Y. Goebel, D.M. Conn, R.W. Campbell, G.A. Leung, W.K. Wilson, K.L. Bauer, W. Causey, R.A. Morse, D.H. Bohdansky, J. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 23 (1987) nr. 4 pages 13 p. |
Year: |
1987 |
Contents: |
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Publisher: |
Published by Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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