Ion beam characterization and engineering of strain in semiconductor multi-layers
Titel:
Ion beam characterization and engineering of strain in semiconductor multi-layers
Auteur:
Nageswara Rao, S.V.S Pathak, Anand P Siddiqui, Azher M Avasthi, D.K Muntele, Claudiu Ila, Daryush Dev, B.N Muralidharan, R Eichhorn, F Groetzschel, R Turos, A
Verschenen in:
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms