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New insight on the interaction and diffusion properties of ion beam injected self-interstitials in crystalline silicon |
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Titel: |
New insight on the interaction and diffusion properties of ion beam injected self-interstitials in crystalline silicon |
Auteur: |
De Salvador, D. Napolitani, E. Mirabella, S. Giannazzo, F. Raineri, V. Bisognin, G. Berti, M. Carnera, A. Drigo, A.V. Terrasi, A. Priolo, F. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 206 (2003) nr. C pagina's 5 p. |
Jaar: |
2003 |
Inhoud: |
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Uitgever: |
Elsevier Science B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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