|
New insight on the interaction and diffusion properties of ion beam injected self-interstitials in crystalline silicon |
|
|
|
Title: |
New insight on the interaction and diffusion properties of ion beam injected self-interstitials in crystalline silicon |
Author: |
De Salvador, D. Napolitani, E. Mirabella, S. Giannazzo, F. Raineri, V. Bisognin, G. Berti, M. Carnera, A. Drigo, A.V. Terrasi, A. Priolo, F. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 206 (2003) nr. C pages 5 p. |
Year: |
2003 |
Contents: |
|
Publisher: |
Elsevier Science B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|