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Measurement of minute local strain in semiconductor materials and electronic devices by using a highly parallel X-ray microbeam |
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Titel: |
Measurement of minute local strain in semiconductor materials and electronic devices by using a highly parallel X-ray microbeam |
Auteur: |
Matsui, J. Tsusaka, Y. Yokoyama, K. Takeda, S. Katou, M. Kurihara, H. Watanabe, K. Kagoshima, Y. Kimura, S. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 199 (2003) nr. C pagina's 4 p. |
Jaar: |
2003 |
Inhoud: |
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Uitgever: |
Elsevier Science B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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