|
Estimation of bonded silicon-on-insulator wafers by means of diffractometry using a parallel X-ray microbeam |
|
|
|
Titel: |
Estimation of bonded silicon-on-insulator wafers by means of diffractometry using a parallel X-ray microbeam |
Auteur: |
Tsusaka, Y. Urakawa, M. Yokoyama, K. Takeda, S. Katou, M. Kurihara, H. Yoshida, F. Watanabe, K. Kagoshima, Y. Matsui, J. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 199 (2003) nr. C pagina's 4 p. |
Jaar: |
2003 |
Inhoud: |
|
Uitgever: |
Elsevier Science B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|