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Details for article 34 of 115 found articles
| Title: |
Estimation of bonded silicon-on-insulator wafers by means of diffractometry using a parallel X-ray microbeam |
| Author: |
Tsusaka, Y. Urakawa, M. Yokoyama, K. Takeda, S. Katou, M. Kurihara, H. Yoshida, F. Watanabe, K. Kagoshima, Y. Matsui, J. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 199 (2003) nr. C pages 4 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 34 of 115 found articles
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