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Investigation of plasma immersion ion implanted niobium oxide and titanium nitride films by nanohardness measurement |
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Titel: |
Investigation of plasma immersion ion implanted niobium oxide and titanium nitride films by nanohardness measurement |
Auteur: |
Königer, A. Ensinger, W. Hammerl, C. Höchbauer, T. Schrag, G. Hartmann, J. Thomae, R.W. Bender, H. Stritzker, B. Rauschenbach, B. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 120 (1996) nr. 1-4 pagina's 4 p. |
Jaar: |
1996 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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