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A study of the blue photoluminescence emission from thermally-grown, Si+-implanted SiO2 films after short-time annealing |
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Titel: |
A study of the blue photoluminescence emission from thermally-grown, Si+-implanted SiO2 films after short-time annealing |
Auteur: |
Skorupa, W. Yankov, R.A. Rebohle, L. Fröb, H. Böhme, T. Leo, K. Tyschenko, I.E. Kachurin, G.A. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 120 (1996) nr. 1-4 pagina's 4 p. |
Jaar: |
1996 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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