|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 68 of 75 found articles
| Title: |
The damage recovery and electrical activation of shallow boron implants in silicon: The effects of high energy implants |
| Author: |
Kyllesbech Larsen, K. Privitera, V. Coffa, S. Priolo, F. Spinella, C. Saggio, M. Campisano, S.U. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 112 (1996) nr. 1-4 pages 5 p. |
| Year: |
1996 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 68 of 75 found articles
| << previous | next >> |