Multicomponent TixNbCrAl nitride films deposited by dc and high-power impulse magnetron sputtering
Titel:
Multicomponent TixNbCrAl nitride films deposited by dc and high-power impulse magnetron sputtering
Auteur:
Shu, Rui Du, Hao Sadowski, Grzegorz Dorri, Megan M. Rosen, Johanna Sortica, Mauricio A. Primetzhofer, Daniel Lundin, Daniel le Febvrier, Arnaud Eklund, Per