Multicomponent TixNbCrAl nitride films deposited by dc and high-power impulse magnetron sputtering
Title:
Multicomponent TixNbCrAl nitride films deposited by dc and high-power impulse magnetron sputtering
Author:
Shu, Rui Du, Hao Sadowski, Grzegorz Dorri, Megan M. Rosen, Johanna Sortica, Mauricio A. Primetzhofer, Daniel Lundin, Daniel le Febvrier, Arnaud Eklund, Per