The sputter performance of an industrial-scale planar Mo-target over its lifetime: Target erosion and film properties
Titel:
The sputter performance of an industrial-scale planar Mo-target over its lifetime: Target erosion and film properties
Auteur:
Rausch, Martin Sabag, Asaf Pichler, Karl-Heinz Gruber, Georg C. Köstenbauer, Judith Köstenbauer, Harald Kreiml, Patrice Cordill, Megan J. Winkler, Jörg Mitterer, Christian