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Journal description
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Details for article 61 of 63 found articles
| Title: |
The sputter performance of an industrial-scale planar Mo-target over its lifetime: Target erosion and film properties |
| Author: |
Rausch, Martin Sabag, Asaf Pichler, Karl-Heinz Gruber, Georg C. Köstenbauer, Judith Köstenbauer, Harald Kreiml, Patrice Cordill, Megan J. Winkler, Jörg Mitterer, Christian |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 381 () nr. C pages p. |
| Year: |
2020 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 61 of 63 found articles
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