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Characterization and optimization of porogen-based PECVD deposited extreme low-k materials as a function of UV-cure time |
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Titel: |
Characterization and optimization of porogen-based PECVD deposited extreme low-k materials as a function of UV-cure time |
Auteur: |
Verdonck, Patrick De Roest, David Kaneko, Shinya Caluwaerts, Rudy Tsuji, Naoto Matsushita, Kiyohiro Kemeling, Nathan Travaly, Youssef Sprey, Hessel Schaekers, Marc Beyer, Gerald |
Verschenen in: |
Surface & coatings technology |
Paginering: |
Jaargang 201 (2007) nr. 22-23 pagina's 5 p. |
Jaar: |
2007 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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