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Journal description
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Details for article 15 of 122 found articles
| Title: |
Characterization and optimization of porogen-based PECVD deposited extreme low-k materials as a function of UV-cure time |
| Author: |
Verdonck, Patrick De Roest, David Kaneko, Shinya Caluwaerts, Rudy Tsuji, Naoto Matsushita, Kiyohiro Kemeling, Nathan Travaly, Youssef Sprey, Hessel Schaekers, Marc Beyer, Gerald |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 201 (2007) nr. 22-23 pages 5 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 122 found articles
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