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Microwave and hot filament chemical vapour deposition of diamond multilayers on Si and WC–Co substrates |
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Title: |
Microwave and hot filament chemical vapour deposition of diamond multilayers on Si and WC–Co substrates |
Author: |
Kadlečíková, M. Vojs, M. Breza, J. Veselý, M. Frgala, Z. Michalka, M. Matějková, J. Vojačková, A. Daniš, T. Marton, M. |
Appeared in: |
Microelectronics journal |
Paging: |
Volume 38 () nr. 1 pages 20-23 |
Year: |
2007 |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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