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Journal description
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Details for article 10 of 12 found articles
| Title: |
Study of microstructure and resistivity evolution for electroplated copper films at near-room temperature |
| Author: |
Teh, W.H Koh, L.T Chen, S.M Xie, J Li, C.Y Foo, P.D |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 32 () nr. 7 pages 579-585 |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 12 found articles
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