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Journal description
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Details for article 52 of 56 found articles
| Title: |
Stacked gate-all-around nanosheet transistors with full-air-spacers for reducing parasitic capacitance to improve device and circuit performance |
| Author: |
Li, Lianlian Cao, Lei Zhang, Xuexiang Li, Qingkun Wu, Zhenhua Zhang, Meihe Bao, Yunjiao Wang, Peng Jiang, Renjie Du, Anyan Zhang, Qingzhu Yin, Huaxiang |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 156 () nr. C pages p. |
| Year: |
2025 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 52 of 56 found articles
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