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Journal description
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Details for article 3 of 14 found articles
| Title: |
A study of Si epitaxial layer growth on SOI wafers prepared by SIMOX |
| Author: |
Cheng, Xinli Lin, Zhilang Wang, Yongjin Zhang, Feng Zou, Shichang Luo, Enzhou Wilson, I.H. |
| Appeared in: |
Vacuum |
| Paging: | Volume 75 (2004) nr. 1 pages 8 p. |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 14 found articles
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