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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 5 of 8 found articles
| Title: |
Intermediate gas phase precursors during plasma CVD of HMDSO |
| Author: |
Theirich, D. Soll, Ch. Leu, F. Engemann, J. |
| Appeared in: |
Vacuum |
| Paging: | Volume 71 (2003) nr. 3 pages 11 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 8 found articles
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