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                                       Details for article 47 of 215 found articles
 
 
  Demands for turbo-molecular pumps in the aluminium etching process
 
 
Title: Demands for turbo-molecular pumps in the aluminium etching process
Author: Kuhn, Monika
Bachmann, P.
Appeared in: Vacuum
Paging: Volume 41 (1990) nr. 7-9 pages 4 p.
Year: 1990
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 47 of 215 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands