An ion beam spot size monitor based on a nano-machined Si photodiode probed by means of the ion beam induced charge technique
Titel:
An ion beam spot size monitor based on a nano-machined Si photodiode probed by means of the ion beam induced charge technique
Auteur:
Andrini, G. Nieto Hernández, E. Provatas, G. Brajkovic, M. Crnjac, A. Tchernij, S. Ditalia Forneris, J. Rigato, V. Campostrini, M. Siketic, Z. Jaksic, M. Vittone, E.