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Nitrogen ratio and RTA optimization on sputtered TiN/SiO2/Si electrolyte-insulator–semiconductor structure for pH sensing characteristics |
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Titel: |
Nitrogen ratio and RTA optimization on sputtered TiN/SiO2/Si electrolyte-insulator–semiconductor structure for pH sensing characteristics |
Auteur: |
Ren, Chang Yang, Chia-Ming Lyu, Chengang Hsu, Chin-Yuan Chen, Tsung-Cheng Wang, Hau-Cheng Yang, Hao Lin, Wei-Tse Juan, Pi-Chun Huang, Chi-Hsien Pijanowska, Dorota G. Wang, Jer-Chyi Tsai, Jung-Ruey |
Verschenen in: |
Vacuum |
Paginering: |
Jaargang 118 (2015) nr. C pagina's 5 p. |
Jaar: |
2015 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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