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Effective work-function control technique applicable to p-type FinFET high-k/metal gate devices |
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Titel: |
Effective work-function control technique applicable to p-type FinFET high-k/metal gate devices |
Auteur: |
Yamaguchi, Shimpei Bayindir, Zeynel He, Xiaoli Uppal, Suresh Srinivasan, Purushothaman Yong, Chloe Choi, Dongil Joshi, Manoj Yang, Hyuck Soo Hu, Owen Samavedam, Srikanth Sohn, D.K. |
Verschenen in: |
Microelectronics reliability |
Paginering: |
Jaargang 72 (2017) nr. C pagina's 5 p. |
Jaar: |
2017 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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