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Effective work-function control technique applicable to p-type FinFET high-k/metal gate devices |
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Title: |
Effective work-function control technique applicable to p-type FinFET high-k/metal gate devices |
Author: |
Yamaguchi, Shimpei Bayindir, Zeynel He, Xiaoli Uppal, Suresh Srinivasan, Purushothaman Yong, Chloe Choi, Dongil Joshi, Manoj Yang, Hyuck Soo Hu, Owen Samavedam, Srikanth Sohn, D.K. |
Appeared in: |
Microelectronics reliability |
Paging: |
Volume 72 (2017) nr. C pages 5 p. |
Year: |
2017 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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