Frequency dependence of the lifetime of a surface micromachined microengine driving a load
Title:
Frequency dependence of the lifetime of a surface micromachined microengine driving a load
Author:
Tanner, Danelle M Miller, William M Peterson, Ken A Dugger, Michael T Eaton, William P Irwin, Lloyd W Senft, Donna C Smith, Norman F Tangyunyong, Paiboon Miller, Samuel L