|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 11 of 15 found articles
| Title: |
Influence of the silicon nitride oxidation on the performances of NCLAD isolation 1 Expanded version of a talk presented at the European Solid State Device Research Conference, ESSDERC'96, Bologna, Italy, September 1996. 1 |
| Author: |
Tixier, A. Senez, V. Baccus, B. Marmiroli, A. Colpani, P. Rebora, A. Carnevale, G.P. |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 38 (1998) nr. 5 pages 11 p. |
| Year: |
1998 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 15 found articles
| << previous | next >> |