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  Application of the atomic force microscope to integrated circuit failure analysis
 
 
Title: Application of the atomic force microscope to integrated circuit failure analysis
Author: Rodgers, Mark R.
Wendman, Mark A.
Yashar, Frank D.
Appeared in: Microelectronics reliability
Paging: Volume 33 (1993) nr. 11-12 pages 10 p.
Year: 1993
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 3 of 20 found articles
 
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