Scaling of high-κ/metal-gate TriGate SOI nanowire transistors down to 10nm width
Titel:
Scaling of high-κ/metal-gate TriGate SOI nanowire transistors down to 10nm width
Auteur:
Coquand, R. Barraud, S. Cassé, M. Leroux, P. Vizioz, C. Comboroure, C. Perreau, P. Ernst, E. Samson, M.-P. Maffini-Alvaro, V. Tabone, C. Barnola, S. Munteanu, D. Ghibaudo, G. Monfray, S. Boeuf, F. Poiroux, T.