New TIT capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60nm and below DRAMs
Titel:
New TIT capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60nm and below DRAMs
Auteur:
Cho, Ho Jin Kim, Young Dae Park, Dong Su Lee, Euna Park, Cheol Hwan Jang, Jun Soo Lee, Keum Bum Kim, Hai Won Ki, Young Jong Han, Il Keun Song, Yong Wook