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Journal description
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Details for article 22 of 31 found articles
| Title: |
New TIT capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60nm and below DRAMs |
| Author: |
Cho, Ho Jin Kim, Young Dae Park, Dong Su Lee, Euna Park, Cheol Hwan Jang, Jun Soo Lee, Keum Bum Kim, Hai Won Ki, Young Jong Han, Il Keun Song, Yong Wook |
| Appeared in: |
Solid-state electronics |
| Paging: | Volume 51 (2007) nr. 11-12 pages 5 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 22 of 31 found articles
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