Evolution of materials technology for stacked-capacitors in 65nm embedded-DRAM
Titel:
Evolution of materials technology for stacked-capacitors in 65nm embedded-DRAM
Auteur:
Gerritsen, Eric Emonet, Nicolas Caillat, Christian Jourdan, Nicolas Piazza, Marc Fraboulet, David Boeck, Bruce Berthelot, Audrey Smith, Steven Mazoyer, Pascale