Analysis of fluorine effects on charge-trap flash memory of W/TiN/Al2O3/Si3N4/SiO2/poly-Si gate stack
Titel:
Analysis of fluorine effects on charge-trap flash memory of W/TiN/Al2O3/Si3N4/SiO2/poly-Si gate stack
Auteur:
Lee, Tae Yoon Lee, Seung Hwan Son, Jun Woo Lee, Sang Jae Bong, Jae Hoon Shin, Eui Joong Kim, Sung Ho Hwang, Wan Sik Moon, Jung Min Choi, Yang Kyu Cho, Byung Jin