Gamma and proton irradiation effects and thermal stability of electrical characteristics of metal-oxide-silicon capacitors with atomic layer deposited Al2O3 dielectric
Titel:
Gamma and proton irradiation effects and thermal stability of electrical characteristics of metal-oxide-silicon capacitors with atomic layer deposited Al2O3 dielectric
Auteur:
RafĂ, J.M. Pellegrini, G. Fadeyev, V. Galloway, Z. Sadrozinski, H.F.-W. Christophersen, M. Phlips, B.F. Lynn, D. Kierstead, J. Hoeferkamp, M. Gorelov, I. Palni, P. Wang, R. Seidel, S.