nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
1 |
A comparison of TRIM and molecular dynamics in calculating the backscattering yield of carbon incident on graphite
|
Bergsåker, H |
|
1993 |
44 |
3-4 |
p. 341-344 4 p. |
artikel |
2 |
Advances of nuclear microscopy in microelectronics analysis
|
Breese, MBH |
|
1993 |
44 |
3-4 |
p. 175-180 6 p. |
artikel |
3 |
A low-voltage, high-current, ion-bombardment source using magnetron principles
|
Ja'fer, HA |
|
1993 |
44 |
3-4 |
p. 381-383 3 p. |
artikel |
4 |
Analysis and control of ion beam processing by optical spectroscopy
|
Heinrich, Friedhelm |
|
1993 |
44 |
3-4 |
p. 275-279 5 p. |
artikel |
5 |
Author index
|
|
|
1993 |
44 |
3-4 |
p. v-vi nvt p. |
artikel |
6 |
Chemical etching of GaAs with a novel low energy ion beam source : A low damage process for device fabrication
|
Beckman, Judith |
|
1993 |
44 |
3-4 |
p. 257-261 5 p. |
artikel |
7 |
Chloromethane-based reactive ion etching of III–V semiconductor materials
|
Law, VJ |
|
1993 |
44 |
3-4 |
p. 233-237 5 p. |
artikel |
8 |
Computer simulation of growth during molecularbeam epitaxy of metal-on-metal surfaces
|
Jakas, Mario M |
|
1993 |
44 |
3-4 |
p. 337-339 3 p. |
artikel |
9 |
Damage caused by Cl2 based dry etching of III–V materials
|
van Roijen, Raymond |
|
1993 |
44 |
3-4 |
p. 231- 1 p. |
artikel |
10 |
Detailed computer simulation of damage accumulation in ion irradiated crystalline targets
|
Jaraiz, M |
|
1993 |
44 |
3-4 |
p. 321-323 3 p. |
artikel |
11 |
Diversity of products by VEECO instruments Ltd
|
|
|
1993 |
44 |
3-4 |
p. 406- 1 p. |
artikel |
12 |
Drilling of fine apertures in thin metallic foils using a focused ion beam
|
Khamsehpour, B |
|
1993 |
44 |
3-4 |
p. 361-365 5 p. |
artikel |
13 |
Dry pump for atmosphere to 10−2 mbar and 10−4 mbar operation
|
|
|
1993 |
44 |
3-4 |
p. 408- 1 p. |
artikel |
14 |
Editorial: Software survey section
|
|
|
1993 |
44 |
3-4 |
p. i-iv nvt p. |
artikel |
15 |
Effect of flow rate on reactive ion etching of GaAs in CH4/H2 plasma
|
Sahafi, HF |
|
1993 |
44 |
3-4 |
p. 263-265 3 p. |
artikel |
16 |
Focused ion beams—microfabrication methods and applications (invited)
|
Prewett, PD |
|
1993 |
44 |
3-4 |
p. 345-351 7 p. |
artikel |
17 |
Fragmentational collisions in reactive ion beam processing
|
Hoffmann, Peter |
|
1993 |
44 |
3-4 |
p. 271-273 3 p. |
artikel |
18 |
High resolution depth profiling in near-surface regions of solids by narrow nuclear reaction resonances below 0.5 MeV with low energy spread proton beams
|
Schulte, WH |
|
1993 |
44 |
3-4 |
p. 185-190 6 p. |
artikel |
19 |
Introduction
|
|
|
1993 |
44 |
3-4 |
p. 165- 1 p. |
artikel |
20 |
Investigation of ion beam synthesized FeSi2 and the α→β-phase transformation
|
Panknin, D |
|
1993 |
44 |
3-4 |
p. 171-174 4 p. |
artikel |
21 |
Ion-assisted selective deposition of aluminium for via-hole interconnections
|
Barklund, AM |
|
1993 |
44 |
3-4 |
p. 197-201 5 p. |
artikel |
22 |
Ion beam-assisted etching of semiconductors: surface chemistry vs surface physics
|
Jackman, Richard B |
|
1993 |
44 |
3-4 |
p. 239-243 5 p. |
artikel |
23 |
Ion beam modification of polymers
|
Sofield, CJ |
|
1993 |
44 |
3-4 |
p. 285-290 6 p. |
artikel |
24 |
Ion energy distributions in SiCl4 and Ar/O2 dry etching discharges
|
Hope, DAO |
|
1993 |
44 |
3-4 |
p. 245-248 4 p. |
artikel |
25 |
Laboratory based space experiments using an ion implanter
|
McKee, JSC |
|
1993 |
44 |
3-4 |
p. 167-170 4 p. |
artikel |
26 |
Micro-machining using a focused ion beam
|
Young, Richard J |
|
1993 |
44 |
3-4 |
p. 353-356 4 p. |
artikel |
27 |
Monitoring implant induced gate oxide stress potentials
|
Angel, Gordon |
|
1993 |
44 |
3-4 |
p. 371-375 5 p. |
artikel |
28 |
New from Balzers
|
|
|
1993 |
44 |
3-4 |
p. 400- 1 p. |
artikel |
29 |
New from Balzers
|
|
|
1993 |
44 |
3-4 |
p. 400- 1 p. |
artikel |
30 |
New from Balzers
|
|
|
1993 |
44 |
3-4 |
p. 399- 1 p. |
artikel |
31 |
New from Balzers
|
|
|
1993 |
44 |
3-4 |
p. 400- 1 p. |
artikel |
32 |
New from Balzers
|
|
|
1993 |
44 |
3-4 |
p. 399-400 2 p. |
artikel |
33 |
New from Edwards
|
|
|
1993 |
44 |
3-4 |
p. 398- 1 p. |
artikel |
34 |
New from Edwards
|
Fowler, Mr JF |
|
1993 |
44 |
3-4 |
p. 398-399 2 p. |
artikel |
35 |
New from Edwards
|
|
|
1993 |
44 |
3-4 |
p. 397- 1 p. |
artikel |
36 |
New from Edwards
|
|
|
1993 |
44 |
3-4 |
p. 397-398 2 p. |
artikel |
37 |
New from Huntington laboratories
|
|
|
1993 |
44 |
3-4 |
p. 403- 1 p. |
artikel |
38 |
New from Huntington laboratories
|
|
|
1993 |
44 |
3-4 |
p. 402-403 2 p. |
artikel |
39 |
New from Huntington laboratories
|
|
|
1993 |
44 |
3-4 |
p. 403- 1 p. |
artikel |
40 |
New from Huntington laboratories
|
|
|
1993 |
44 |
3-4 |
p. 402- 1 p. |
artikel |
41 |
New from Huntington laboratories
|
|
|
1993 |
44 |
3-4 |
p. 402- 1 p. |
artikel |
42 |
New from LEYBOLD
|
|
|
1993 |
44 |
3-4 |
p. 399- 1 p. |
artikel |
43 |
New from LEYBOLD
|
|
|
1993 |
44 |
3-4 |
p. 399- 1 p. |
artikel |
44 |
New from VAT vacuum products
|
|
|
1993 |
44 |
3-4 |
p. 401- 1 p. |
artikel |
45 |
New from VAT vacuum products
|
|
|
1993 |
44 |
3-4 |
p. 400-401 2 p. |
artikel |
46 |
New from VG and microtech
|
|
|
1993 |
44 |
3-4 |
p. 397- 1 p. |
artikel |
47 |
New from VSW scientific instruments
|
|
|
1993 |
44 |
3-4 |
p. 403-404 2 p. |
artikel |
48 |
New ion gauge controller from Terranova
|
|
|
1993 |
44 |
3-4 |
p. 404- 1 p. |
artikel |
49 |
New ionization gauge from Grancille-Phillips
|
|
|
1993 |
44 |
3-4 |
p. 401- 1 p. |
artikel |
50 |
New literature from MRS
|
|
|
1993 |
44 |
3-4 |
p. 410-411 2 p. |
artikel |
51 |
New literature from MRS
|
|
|
1993 |
44 |
3-4 |
p. 410- 1 p. |
artikel |
52 |
New literature from MRS
|
|
|
1993 |
44 |
3-4 |
p. 410- 1 p. |
artikel |
53 |
New product from Tosoh SMD
|
|
|
1993 |
44 |
3-4 |
p. 401- 1 p. |
artikel |
54 |
New product manager forTosoh SMD
|
|
|
1993 |
44 |
3-4 |
p. 407- 1 p. |
artikel |
55 |
New product manager forTosoh SMD
|
|
|
1993 |
44 |
3-4 |
p. 407-408 2 p. |
artikel |
56 |
News from atom tech UK
|
|
|
1993 |
44 |
3-4 |
p. 410- 1 p. |
artikel |
57 |
News from catalogue
|
|
|
1993 |
44 |
3-4 |
p. 408-409 2 p. |
artikel |
58 |
News from Edwards
|
|
|
1993 |
44 |
3-4 |
p. 405- 1 p. |
artikel |
59 |
News from Edwards
|
|
|
1993 |
44 |
3-4 |
p. 405- 1 p. |
artikel |
60 |
News from GEC
|
|
|
1993 |
44 |
3-4 |
p. 409-410 2 p. |
artikel |
61 |
News from intellemetrics
|
|
|
1993 |
44 |
3-4 |
p. 406- 1 p. |
artikel |
62 |
News from LEYBOLD
|
|
|
1993 |
44 |
3-4 |
p. 409- 1 p. |
artikel |
63 |
News from LEYBOLD
|
|
|
1993 |
44 |
3-4 |
p. 409- 1 p. |
artikel |
64 |
News from Rietschle
|
|
|
1993 |
44 |
3-4 |
p. 406-407 2 p. |
artikel |
65 |
News from VG microtech
|
|
|
1993 |
44 |
3-4 |
p. 404- 1 p. |
artikel |
66 |
News from VG microtech
|
|
|
1993 |
44 |
3-4 |
p. 404-405 2 p. |
artikel |
67 |
News from VSW
|
|
|
1993 |
44 |
3-4 |
p. 408- 1 p. |
artikel |
68 |
Nitrogen profiles of thin sputtered PVD silicon nitride films
|
Markwitz, A |
|
1993 |
44 |
3-4 |
p. 367-370 4 p. |
artikel |
69 |
Novel precursors for chemically assisted ion beam etching : reactions of dichloroethane on GaAs (100)
|
Marshall, Duncan |
|
1993 |
44 |
3-4 |
p. 249-256 8 p. |
artikel |
70 |
Profiles of ion beams extracted from impregnated-electrode-type liquid-metal ion source with linear array emission points
|
Ishikawa, J |
|
1993 |
44 |
3-4 |
p. 357-360 4 p. |
artikel |
71 |
Quartz resonator techniques for simultaneous measurement of areal mass density, lateral stress, and temperature in thin films
|
Way, AS |
|
1993 |
44 |
3-4 |
p. 385-388 4 p. |
artikel |
72 |
Radio frequency plasma sputter type heavy negative ion source
|
Ishikawa, Junzo |
|
1993 |
44 |
3-4 |
p. 203-207 5 p. |
artikel |
73 |
Reactive ion-plating at low ion energies with an unbalanced magnetron
|
Howson, RP |
|
1993 |
44 |
3-4 |
p. 191-195 5 p. |
artikel |
74 |
Reactive unbalanced magnetron sputtering of hydrogenated amorphous silicon and silicon oxide
|
Hall, GW |
|
1993 |
44 |
3-4 |
p. 227-230 4 p. |
artikel |
75 |
Recent measurements of nuclear reaction cross-sections with ion beams at very low energies
|
Cecil, FE |
|
1993 |
44 |
3-4 |
p. 181-183 3 p. |
artikel |
76 |
SIMS analysis using molecular ions for the study of boron precipitation in silicon
|
Chew, A |
|
1993 |
44 |
3-4 |
p. 223-226 4 p. |
artikel |
77 |
Simulation of ion beam assisted deposition—a comparison with experimental results
|
Ektessabi, AM |
|
1993 |
44 |
3-4 |
p. 213-217 5 p. |
artikel |
78 |
Sputtering of NiTi alloys: a comparison of experiment and simulation
|
Neshev, I |
|
1993 |
44 |
3-4 |
p. 209-212 4 p. |
artikel |
79 |
The anomalous depth distribution of low dose oxygen and nitrogen ions implanted into silicon
|
Wong, JKY |
|
1993 |
44 |
3-4 |
p. 219-222 4 p. |
artikel |
80 |
The effect of beam divergence on single crystal implant profiles
|
Chakarov, IR |
|
1993 |
44 |
3-4 |
p. 325-329 5 p. |
artikel |
81 |
The effect of oxygen flooding on the secondary ion yields of matrix and impurity species in InP and InGaAs
|
Waddilove, AE |
|
1993 |
44 |
3-4 |
p. 389-395 7 p. |
artikel |
82 |
Theoretical calculations of the broadening of dilute Si, Al and Be doped δ layers in GaAs during SIMS depth profiling
|
Badheka, R |
|
1993 |
44 |
3-4 |
p. 331-335 5 p. |
artikel |
83 |
The reactive sputtering of thin films of TiN at low target voltages
|
Swady, RA |
|
1993 |
44 |
3-4 |
p. 297-301 5 p. |
artikel |
84 |
The structure of small clusters ejected by ion bombardment of solids
|
Ali, Montaz |
|
1993 |
44 |
3-4 |
p. 377-379 3 p. |
artikel |
85 |
The theory of ion beam polishing and machining
|
Carter, G |
|
1993 |
44 |
3-4 |
p. 303-309 7 p. |
artikel |
86 |
Trapping mechanisms in scattering of beams at grazing incidence from crystals
|
Smith, Roger |
|
1993 |
44 |
3-4 |
p. 311-319 9 p. |
artikel |
87 |
Ultra-high vacuum systems with cryopumps
|
|
|
1993 |
44 |
3-4 |
p. 407- 1 p. |
artikel |
88 |
Ultra-high vacuum systems with cryopumps
|
|
|
1993 |
44 |
3-4 |
p. 407- 1 p. |
artikel |
89 |
Vacuum diary conferences on related topics
|
|
|
1993 |
44 |
3-4 |
p. 413-416 4 p. |
artikel |
90 |
Waveguide lasers in insulators using ion implantation
|
Townsend, PD |
|
1993 |
44 |
3-4 |
p. 267-270 4 p. |
artikel |
91 |
Waveguide properties of He+-implanted chromium doped laser materials
|
Rodman, MJ |
|
1993 |
44 |
3-4 |
p. 281-283 3 p. |
artikel |
92 |
Wear reduction by ion implantation-assisted deposition
|
Kolitsch, A |
|
1993 |
44 |
3-4 |
p. 291-295 5 p. |
artikel |
93 |
Welch foundation scholarship 1994
|
|
|
1993 |
44 |
3-4 |
p. 411- 1 p. |
artikel |
94 |
Wide range anti-reflection coating for the visible, uv and air available from Balzers
|
|
|
1993 |
44 |
3-4 |
p. 406- 1 p. |
artikel |