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Journal description
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Details for article 14 of 83 found articles
| Title: |
Dielectric Properties of Ultra Dense (3 g/cm3) Silicon Nitride Deposited by Hot Wire CVD at Industrially Relevant High Deposition Rates |
| Author: |
Houweling, Zomer Silvester Verlaan, Vasco van der Werf, Karine Goldbach, Hanno D. Schropp, Ruud E. I. |
| Appeared in: |
MRS proceedings |
| Paging: | Volume 989 () nr. 1 pages xx |
| Year: |
2007-04-25 |
| Contents: | |
| Publisher: |
Springer International Publishing, Cham |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 14 of 83 found articles
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