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Journal description
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Details for article 6 of 32 found articles
| Title: |
Dielectric Recovery of Plasma Damaged Organosilicate Low-k Films |
| Author: |
Shi, Hualiang Bao, Junjing Huang, Huai Liu, Junjun Ryan, Scott Smith Sun, Yangming Paul, S. Ho Michael, L. McSwiney Moinpour, Mansour Grant, M. Kloster |
| Appeared in: |
MRS proceedings |
| Paging: | Volume 1079 () nr. 1 pages xx |
| Year: |
2008-12-01 |
| Contents: | |
| Publisher: |
Springer International Publishing, Cham |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 32 found articles
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