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                                       Details for article 18 of 20 found articles
 
 
  Silizium — Mikrotechnik für thermische Sensoren - Silicon — micromachining for thermal sensors
 
 
Title: Silizium — Mikrotechnik für thermische Sensoren - Silicon — micromachining for thermal sensors
Author: Kohl, F.
Urban, G.
Steurer, J.
Olcaytug, F.
Jachimowicz, A.
Glaninger, A.
Keplinger, F.
Fasching, R.
Biacovsky, D.
Appeared in: E & I
Paging: Volume 115 (1998) nr. 7-8 pages 391-395
Year: 1998
Contents:
Publisher: Springer-Verlag, Vienna
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 18 of 20 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands